Piezoelectric resonator operating in thickness shear mode
An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric material can be a piezoelectric and the second dielectric material can be non-piezoelectric.In another embodiment,the first dielectric material is a piezoelectric of first polarity and the second dielectric material is a piezoelectric of opposite polarity or different polarity. Where needed, the resonant layer is supported on a reflector composed of series of layers of high acoustic impedance material(s) alternating with layers of low acoustic impedance material(s). For example, the reflector comprises AlN,Al2O3, Ta2O5, HfO2or W as high impedance material and SiO2 as low impedance material.
41610797
Alternative title(s) : (de) Piezoelektrischer resonator mit betrieb im dickeschermodus (fr) Résonateur piézoélectrique fonctionnant en mode de cisaillement d'épaisseur
TTO:6.0791
Patent number | Country code | Kind code | Date issued |
US8829766 | US | B2 | 2014-09-09 |
EP2345157 | EP | A4 | 2012-10-31 |
EP2345157 | EP | A2 | 2011-07-20 |
US2011121683 | US | A1 | 2011-05-26 |
WO2010013197 | WO | A3 | 2010-03-25 |
WO2010013197 | WO | A2 | 2010-02-04 |