Piezoelectric resonator operating in thickness shear mode
An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric material can be a piezoelectric and the second dielectric material can be non-piezoelectric.In another embodiment,the first dielectric material is a piezoelectric of first polarity and the second dielectric material is a piezoelectric of opposite polarity or different polarity. Where needed, the resonant layer is supported on a reflector composed of series of layers of high acoustic impedance material(s) alternating with layers of low acoustic impedance material(s). For example, the reflector comprises AlN,Al2O3, Ta2O5, HfO2or W as high impedance material and SiO2 as low impedance material.
- Search for this record at the European Patent Office
Record created on 2015-09-22, modified on 2016-08-09