High-resolution microscopy and photolithography devices using focusing micromirrors

The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors.


Year:
2010
Other identifiers:
TTO: 6.0877
EPO Family ID: 42145093
Laboratories:




 Record created 2015-09-22, last modified 2018-03-18


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