Electrical Property of Platinum Micro Heater for Thermal Analysis of Microfluidic Device

This paper shows thermal measurement and analysis of a microfluidic device integrated with local thin film heater. Thermal analysis was calculated by finite element modeling. Electrical property of the micro heater was calibrated in advance of the thermal analysis due to the difference from the bulk property of Pt. The thermal analysis results agreed well with experimental results. Our integrative approach suggests an importance of proper electrical measurement in micro heaters with Joule heating.


Publié dans:
IEEJ Transactions on Sensors and Micromachines, 135, 8, 338-342
Année
2015
Mots-clefs:
Laboratoires:


Note: PRIVATE


 Notice créée le 2015-08-03, modifiée le 2019-03-17

n/a:
Télécharger le document
PDF

Évaluer ce document:

Rate this document:
1
2
3
 
(Pas encore évalué)