Electrical Property of Platinum Micro Heater for Thermal Analysis of Microfluidic Device

This paper shows thermal measurement and analysis of a microfluidic device integrated with local thin film heater. Thermal analysis was calculated by finite element modeling. Electrical property of the micro heater was calibrated in advance of the thermal analysis due to the difference from the bulk property of Pt. The thermal analysis results agreed well with experimental results. Our integrative approach suggests an importance of proper electrical measurement in micro heaters with Joule heating.


Published in:
IEEJ Transactions on Sensors and Micromachines, 135, 8, 338-342
Year:
2015
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 Record created 2015-08-03, last modified 2018-12-03

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