Infoscience

Conference paper

Monolithic integration in Fused Silica: When Fluidics, Mechanics and Optics meet in a single substrate

We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation. This microsystem fabrication method is not only particularly attractive for optofluidics instruments but also for optomechanical devices.

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material