Towards fast femtosecond laser micromachining of glass, effect of deposited energy

We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.


Published in:
2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS)
Presented at:
Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS), San Jose, California, May 16-21, 2010
Year:
2010
Publisher:
New York, NY, IEEE
Laboratories:




 Record created 2015-07-20, last modified 2018-03-17


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