Towards fast femtosecond laser micromachining of glass, effect of deposited energy
2010
Abstract
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.
Details
Title
Towards fast femtosecond laser micromachining of glass, effect of deposited energy
Author(s)
Rajesh, Sheeba ; Bellouard, Yves
Published in
CLEO/QELS: 2010 Laser Science to Photonic Applications
Conference
Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS), San Jose, California, May 16-21, 2010
Date
2010
Publisher
New York, NY, IEEE
Laboratories
GALATEA
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > GALATEA - Galatea Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2015-07-20