Infoscience

Conference paper

Towards fast femtosecond laser micromachining of glass, effect of deposited energy

We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.

    Reference

    • EPFL-CONF-210130

    Record created on 2015-07-20, modified on 2016-08-09

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