Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers
Bellouard, Yves; Lenssen, B.; Tielen, V.; Yang, T.
2013

Abstract

Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.

Details

Title Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers
Author(s) Bellouard, Yves ; Lenssen, B. ; Tielen, V. ; Yang, T.
Published in CLEO: Applications and Technology 2013
Series Conference on Lasers and Electro-Optics
Pages ATu2N.2
Conference Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, June 09-14, 2013
Date 2013
Publisher New York, NY, IEEE
ISBN 978-1-55752-973-2
DOI https://doi.org/10.1364/CLEO_AT.2013.ATu2N.2
Other identifier(s) View record in Web of Science
Laboratories GALATEA
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > GALATEA - Galatea Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date 2015-07-20