Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS
Bellouard, Yves
2013

Abstract

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

Details

Title Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS
Author(s) Bellouard, Yves
Published in 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
Conference 10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), Kyoto, JAPAN, June 30 - July 04, 2013
Date 2013
Publisher New York, NY, IEEE
ISBN 978-1-4673-6476-8
DOI https://doi.org/10.1109/CLEOPR.2013.6600168
Other identifier(s) View record in Web of Science
Laboratories GALATEA
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > GALATEA - Galatea Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date 2015-07-20