Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth. © 2014 SPIE.


Editor(s):
Geohegan, DB
Trager, F
Dubowski, JJ
Published in:
SYNTHESIS AND PHOTONICS OF NANOSCALE MATERIALS XI, 8969
Presented at:
Conference on Synthesis and Photonics of Nanoscale Materials XI, San Francisco, CA, February 2-4, 2014
Year:
2014
Publisher:
BELLINGHAM, WA, SPIE-INT SOC OPTICAL ENGINEERING
Keywords:
Laboratories:




 Record created 2015-07-20, last modified 2018-09-13


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