Microsystems and Sensors

In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.


Editor(s):
Osellame, Roberto
Cerullo, Giulio
Ramponi, Roberta
Published in:
Femtosecond Laser Micromachining, 443-465
Year:
2011
Publisher:
Berlin, Heidelberg, Springer Berlin Heidelberg
ISBN:
978-3-642-23365-4
Laboratories:




 Record created 2015-07-20, last modified 2018-03-17


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