Microsystems and Sensors
Bellouard, Yves; Said, Ali A.; Dugan, Mark; Bado, Philippe
2011

Abstract

In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.

Details

Title Microsystems and Sensors
Author(s) Bellouard, Yves ; Said, Ali A. ; Dugan, Mark ; Bado, Philippe
Published in Femtosecond Laser Micromachining
Editor(s)
Series Topics in Applied Physics
Pages 443-465
Date 2011
Publisher Berlin, Heidelberg, Springer Berlin Heidelberg
ISBN 978-3-642-23365-4
DOI https://doi.org/10.1007/978-3-642-23366-1_16
Laboratories GALATEA
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > GALATEA - Galatea Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Work outside EPFL
Book chapters
Published
Record creation date 2015-07-20

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