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research article
On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]
This paper reports on the mechanical properties of fused silica flexures manufactured by a two-step process combining femtosecond lasers exposure below the ablation threshold and chemical etching. Flexural strengths as high as 2.7 GPa were measured, demonstrating that femtosecond lasers can be efficiently used to produce arbitrarily shaped high-strength mechanical devices, opening new opportunities for the design of monolithically integrated optomechanical devices.
Type
research article
Authors
Publication date
2011
Publisher
Published in
Volume
1
Issue
5
Start page
816
End page
831
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 20, 2015
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