000210073 001__ 210073
000210073 005__ 20181203023935.0
000210073 0247_ $$2doi$$a10.1007/978-3-319-05711-8_10
000210073 037__ $$aARTICLE
000210073 245__ $$aDesign and Fabrication of a Prototype Actuator for Fourier Transform Interferometry
000210073 269__ $$a2014
000210073 260__ $$c2014
000210073 336__ $$aJournal Articles
000210073 520__ $$aThe design, fabrication and characterisation of an uniaxial scanning mirror component for interferometry applications is presented. The device is fabricated in fused silica by means of femtosecond laser irradiation and a selective etching step. The fabricated actuator produces bidirectional, repeatable sinusoidal motion with a displacement (200 μm) larger than the wavelengths under investigation (300–700 nm), rendering it suitable for application within an interferometry setup. This indicates that future fabrication of fully integrated interferometer measurement devices in fused silica are realisable.
000210073 700__ $$aMelpignano, G. G.
000210073 700__ $$aSchaap, A.
000210073 700__ $$g109297$$aBellouard, Yves$$0248800
000210073 773__ $$j306$$tProgress in Optomechatronic Technologies$$q97-105
000210073 909C0 $$xU13016$$0252537$$pGALATEA
000210073 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:210073
000210073 917Z8 $$x144315
000210073 937__ $$aEPFL-ARTICLE-210073
000210073 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000210073 980__ $$aARTICLE