Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.


Published in:
Micromachines, 5, 3, 697-710
Year:
2014
Publisher:
MDPI
ISSN:
2072-666X
Laboratories:




 Record created 2015-07-20, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)