Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.


Published in:
Optics Express, 13, 17, 6635-6644
Year:
2005
Publisher:
Optical Society of America
ISSN:
1094-4087
Laboratories:




 Record created 2015-07-20, last modified 2018-03-17


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