Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).


Published in:
Optics Express, 12, 10, 2120-2129
Year:
2004
Publisher:
Optical Society of America
ISSN:
1094-4087
Laboratories:




 Record created 2015-07-20, last modified 2018-12-03


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)