000209996 001__ 209996
000209996 005__ 20181203023934.0
000209996 0247_ $$2doi$$a10.1016/j.mee.2015.03.055
000209996 022__ $$a0167-9317
000209996 02470 $$2ISI$$a000362152200023
000209996 037__ $$aARTICLE
000209996 245__ $$aFabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide
000209996 269__ $$a2015
000209996 260__ $$aAmsterdam$$bElsevier$$c2015
000209996 300__ $$a3
000209996 336__ $$aJournal Articles
000209996 520__ $$aVanadium dioxide thin films were deposited on amorphous SiO2-coated Si substrates, by reactive magnetron sputtering at 490 °C of a pure vanadium target. The deposition parameters were optimized in order to maximize the resistivity modulation due to the metal–insulator transition. The best results were obtained working at an operating pressure of 2 · 10−3 mbar, a constant argon flow of 12.5 sccm and a starting oxygen flow of 2.41 sccm with a feedback control to keep constant the oxygen partial pressure in the sputtering chamber. This allowed to observe for the first time an electrically induced metal–insulator transition with a resistance ratio as high as 824.8 for sputtered VO2 on SiO2/Si substrates.
000209996 6531_ $$avanadium dioxide
000209996 6531_ $$ametal-insulator transition
000209996 6531_ $$asputtering
000209996 6531_ $$aabrupt switching
000209996 700__ $$0245556$$aVitale, Wolfgang Amadeus$$g196349
000209996 700__ $$0245800$$aMoldovan, Clara Fausta$$g191732
000209996 700__ $$0242619$$aPaone, Antonio$$g178981
000209996 700__ $$aSchüler, Andreas
000209996 700__ $$0241430$$aIonescu, Adrian Mihai$$g122431
000209996 773__ $$j145$$q117-119$$tMicroelectronic Engineering
000209996 8564_ $$uhttp://www.sciencedirect.com/science/article/pii/S0167931715001938$$zURL
000209996 909C0 $$0252072$$pLESO-PB$$xU10262
000209996 909C0 $$0252177$$pNANOLAB$$xU10328
000209996 909CO $$ooai:infoscience.tind.io:209996$$particle$$pSTI$$pENAC
000209996 917Z8 $$x196349
000209996 917Z8 $$x173008
000209996 937__ $$aEPFL-ARTICLE-209996
000209996 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000209996 980__ $$aARTICLE