Self-aligned VCSEL-microlens scanner with large scan range
Quack, Niels; Chou, J. B.; Wu, M. C.
2012

Abstract

This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.

Details

Title Self-aligned VCSEL-microlens scanner with large scan range
Author(s) Quack, Niels ; Chou, J. B. ; Wu, M. C.
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages 656-659
Conference 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29 - February 2, 2012
Date 2012
Publisher IEEE
DOI https://doi.org/10.1109/MEMSYS.2012.6170272
Laboratories Q-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date 2015-07-09