Self-aligned VCSEL-microlens scanner with large scan range

This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.


Published in:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 656-659
Presented at:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29 - February 2, 2012
Year:
2012
Publisher:
IEEE
Laboratories:




 Record created 2015-07-09, last modified 2018-09-13


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