We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×106) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.
Title
A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides
Published in
Conference on Lasers and Electro-Optics 2012
Pages
CW1M.5
Conference
CLEO: Science and Innovations, San Jose, California, 2012
Date
2012
Publisher
Washington, D.C., OSA
Record creation date
2015-07-09