Infoscience

Conference paper

A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides

We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×106) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.

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