Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time

We report on 50x50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1x2 waveguide switches have been integrated on 9mmx9mm chips


Published in:
Optical Fiber Communication Conference, M2K.2
Presented at:
Optical Fiber Communication Conference, San Francisco, California, 2014
Year:
2014
Publisher:
Washington, D.C., OSA
Laboratories:




 Record created 2015-07-09, last modified 2018-03-17


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