Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration


Presented at:
International Nano-Optoelectronics Workshop, UC Berkeley and Stanford University, CA, USA, August 7-15, 2012
Year:
2012
Laboratories:




 Record created 2015-07-08, last modified 2018-03-17


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