Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors

Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors


Presented at:
MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 19, 2009
Year:
2009
Laboratories:




 Record created 2015-07-08, last modified 2018-01-28


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