Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors
Quack, Niels; Blunier, Stefan; Dual, Jurg; Arnold, Martin; Felder, Ferdinand; Rahim, Mohamed; Zogg, Hans
2009

Abstract

Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors

Details

Title Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors
Author(s) Quack, Niels ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Rahim, Mohamed ; Zogg, Hans
Conference MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 19, 2009
Date 2009
Laboratories Q-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Work outside EPFL
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Record creation date 2015-07-08