A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors
2008
Details
Title
A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors
Author(s)
Quack, Niels ; Rust, Philipp ; Blunier, Stefan ; Dual, Jurg ; Felder, Ferdinand ; Rahim, Mohamed ; Fill, Matthias ; Arnold, Martin ; Zogg, Hans
Conference
34th international conference on Micro and Nano Engineering (MNE), Athens, Greece, September 15-18, 2008
Date
2008
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Presentations & Talks
Work produced at EPFL
Presentations & Talks
Work produced at EPFL
Record creation date
2015-07-08