A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors


Presented at:
34th international conference on Micro and Nano Engineering (MNE), Athens, Greece, September 15-18, 2008
Year:
2008
Laboratories:




 Record created 2015-07-08, last modified 2018-09-13


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