Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors
2008
Details
Title
Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors
Author(s)
Quack, Niels ; Rust, Philipp ; Blunier, Stefan ; Dual, Jurg ; Felder, Ferdinand ; Arnold, Martin ; Rahim, Mohamed ; Fill, Matthias ; Zogg, Hans
Published in
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics
Pages
174-175
Conference
2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics, Freiburg, Germany, August, 11-14, 2008
Date
2008
Publisher
IEEE
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2015-07-08