MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors
Quack, Niels; Blunier, Stefan; Dual, Jurg; Arnold, Martin; Felder, Ferdinand; Ebneter, Christian; Rahim, Mohamed; Zogg, Hans
2007

Abstract

MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors

Details

Title MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors
Author(s) Quack, Niels ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Ebneter, Christian ; Rahim, Mohamed ; Zogg, Hans
Conference 33rd International Conference on Micro- and Nano-Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007
Date 2007
Laboratories Q-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Work outside EPFL
Posters
Record creation date 2015-07-08

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