Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors

Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors


Presented at:
MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 8, 2007
Year:
2007
Laboratories:




 Record created 2015-07-08, last modified 2018-03-17


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