Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors
2007
Abstract
Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors
Details
Title
Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors
Author(s)
Quack, Niels ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Rahim, Mohamed ; Zogg, Hans
Conference
MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 8, 2007
Date
2007
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Work outside EPFL
Posters
Work outside EPFL
Posters
Record creation date
2015-07-08