Integrated VCSEL-Microlens Scanner With Large Scan Range
We present an integrated beam steering system with a microlens scanner and a vertical cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled with an alignment sphere process and with an accuracy of 121 ±7 μm defined by precision microspheres. The microlens scanner employs an electrostatic comb-drive actuator with prebent springs to extend the maximum displacement to 83 μm; 60% larger than that with standard folded springs. This translates to an angular scan range of ±9.6Â° with the double sided comb-drive scanner. The mechanical resonance with lens is measured to be 236 Hz.
Keywords: Beam steering ; Laser beams ; Lenses ; Micromechanical devices ; Microoptics ; Optical beams ; Springs ; Vertical cavity surface emitting lasers ; alignment sphere process ; beam steering ; double sided comb-drive scanner ; electrostatic actuators ; electrostatic comb-drive actuator ; integrated VCSEL-microlens scanner ; integrated beam steering system ; integrated optics ; large displacement ; large scan range ; laser cavity resonators ; mechanical resonance ; micro-optomechanical devices ; microlenses ; optical scanners ; optics ; packaging ; packaging. ; precision microspheres ; surface emitting lasers ; vertical cavity surface-emitting laser
Record created on 2015-07-07, modified on 2016-08-09