Lead salt resonant cavity enhanced detector with MEMS mirror

We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-€“VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n+ heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from <3 μm up to >30 μm.


Published in:
Physics Procedia, 3, 2, 1127-1131
Year:
2010
ISSN:
1875-3892
Keywords:
Laboratories:




 Record created 2015-07-07, last modified 2018-09-13

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