A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors

The realization of a vertically moving micromirror using electrostatic actuation in a comb drive configuration is presented. The micromirror is designed for the use in tunable mid-infrared Resonant Cavity Enhanced Detectors (RCEDs). It can be displaced more than 2.5 μm with less than 30 V actuation voltage. In addition to the pure out-of-plane movement, the mirror can be tilted by applying different voltages at the different comb drive actuators. A voltage difference of 30 V on opposite comb drive actuators induces a mirror tilt of 0.23°. Measured spectra of a tunable RCED employing the presented micromirror are included.


Published in:
Microelectronic Engineering, 86, 4-6, 1243-1246
Year:
2009
Publisher:
Elsevier
ISSN:
0167-9317
Keywords:
Laboratories:




 Record created 2015-07-07, last modified 2018-03-17

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