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Special Issue: 15 Years of SU8 as MEMS Material
Bertsch, Arnaud
;
Renaud, Philippe
2015
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Title
Special Issue: 15 Years of SU8 as MEMS Material
Author(s)
Bertsch, Arnaud
;
Renaud, Philippe
Published in
Micromachines
Pagination
3
Volume
6
Issue
6
Pages
790-792
Date
2015
Publisher
Basel, MDPI
ISSN
2072-666X
DOI
https://doi.org/10.3390/mi6060790
Other identifier(s)
View record in Web of Science
Laboratories
LMIS4
Record Appears in
Scientific production and competences
>
STI - School of Engineering
>
IEM - Institut d'Electricité et de Microtechnique
>
LMIS4 - Microsystems Laboratory 4
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2015-06-22
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2072-666X-6-6-790