000208853 001__ 208853
000208853 005__ 20180317092538.0
000208853 0247_ $$2doi$$a10.1016/j.sna.2015.02.039
000208853 022__ $$a0924-4247
000208853 02470 $$2ISI$$a000355043800002
000208853 037__ $$aARTICLE
000208853 245__ $$aComparing membrane- and cantilever-based surface stress sensors for reproducibility
000208853 260__ $$aLausanne$$bElsevier$$c2015
000208853 269__ $$a2015
000208853 300__ $$a7
000208853 336__ $$aJournal Articles
000208853 520__ $$aPoint-of-care (PoC) applications require small, fast, and low power sensors with high reliability. Despite showing promising performances, nanomechanical sensors have not yet demonstrated the excellent reproducibility of measurements necessary to be incorporated-in such systems. Coffee-ring effect usually occurs during the deposition of the functionalization layer and produces an inhomogeneous and poorly repeatable profile on the sensor surface. In this study, we investigated how cantilever-based sensors and the previously developed membrane-type surface stress sensor (MSS) are affected by an inhomogeneous functionalization. We functionalized 8 piezoresistive cantilevers and 16 MSS with a dextran solution that formed an inhomogeneous layer due to the coffee ring effect. During expositions to humidity pulses, MSS was five times more reproducible (standard deviations between 5% and 6%) compared to the cantilever-based sensors (standard deviations between 25% and 28%). In fact, the cantilever-based sensors were as reproducible as their functionalization layer while the reproducibility of MSS was only limited by the tolerances of their fabrication. This sensor-to-sensor reproducibility, combined with a high sensitivity, makes the MSS a promising bio/chemical sensor platform for reliable and label-free detection of substances to be integrated into PoC systems. (C) 2015 Elsevier B.V. All rights reserved.
000208853 6531_ $$aBio/chemical sensor
000208853 6531_ $$aNanomechanical sensor
000208853 6531_ $$aSurface stress
000208853 6531_ $$aPiezoresistive readout
000208853 6531_ $$aReproducibility
000208853 700__ $$0243312$$aLoizeau, Frédéric$$g154398
000208853 700__ $$0243294$$aAkiyama, Terunobu$$g190003
000208853 700__ $$0243290$$aGautsch, Sebastian$$g190049
000208853 700__ $$aVettiger, Peter
000208853 700__ $$aYoshikawa, Genki
000208853 700__ $$aDe Rooij, Nico F.
000208853 773__ $$j228$$q9-15$$tSensors and Actuators A: Physical
000208853 909CO $$ooai:infoscience.tind.io:208853$$particle
000208853 909C0 $$0252173$$pSAMLAB$$xU10329
000208853 917Z8 $$x190049
000208853 937__ $$aEPFL-ARTICLE-208853
000208853 973__ $$aEPFL$$rNON-REVIEWED$$sPUBLISHED
000208853 980__ $$aARTICLE