Overview on low temperature co-fired ceramic sensors
Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.
Keywords: Technologie couches épaisses ; Couches épaisses ; Thick-film technology ; LTCC ; Céramique co-cuite basse température ; Low-temperature coffered ceramic ; Capteurs ; Sensors ; Structuration ; Céramiques ; Ceramics ; Matériaux ; Materials
Review, collaboration Poly Wrocław - EPFL - TU-Ilmenau - Jožef-Stefan Institute
Record created on 2015-06-01, modified on 2016-08-09