Overview on low temperature co-fired ceramic sensors

Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.


Published in:
Sensors and Actuators A, 233, 125-146
Year:
2015
Publisher:
Lausanne, Elsevier
ISSN:
0924-4247
Keywords:
Note:
Review, collaboration Poly Wrocław - EPFL - TU-Ilmenau - Jožef-Stefan Institute
Laboratories:




 Record created 2015-06-01, last modified 2018-09-13

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