Conference paper

Finfet With Fully Ph-Responsive Hfo2 As Highly Stable Biochemical Sensor

In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO2 gate oxide demonstrate full pH-response with Delta V-th approximate to 56 mV/pH. High readout sensitivity S-out = Delta I-d/I-d approximate to 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and I-on/I-off = 1.5x10(6). High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h


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