On The Optimization And Performances Of A Compact Piezoelectric Impact Mems Energy Harvester

This paper presents the development of a compact energy harvesting configuration to convert low frequency, mechanical oscillations into usable electrical energy using AFM-like MEMS piezoelectric cantilevers coupled to a rotating gear. In this approach, one or several piezoelectric harvesters can be positioned above a rotating gear driven by an oscillating mass. In order to analyze the motion and the electrical power output from the harvester, analytical and finite element models have been developed. The harvester, with an active device volume of 3.5 mm(3) (3x5x0.23 mm(3)), is able to produce an average output power of 12 mu W measured across an optimal resistive load of 4.7 k Omega at a rotational speed of 19 rps, demonstrating the potential of the compact MEMS piezoelectric micro-power generator.

Published in:
27th International Conference On Micro Electro Mechanical Systems (MEMS), 429-432
Presented at:
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014
New York, IEEE

 Record created 2015-05-29, last modified 2020-07-29

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