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conference paper
Resonant rf network antennas for inductively-coupled plasma sources
2014
Proceeding 41st EPS Conference on Plasma Physics, Berlin, Germany, 23-27 June 2014
Use this identifier to reference this record
Type
conference paper
Authors
Howling, A A
•
Guittienne, Ph
•
Hollenstein, Ch
•
Furno, I
Publication date
2014
Published in
Proceeding 41st EPS Conference on Plasma Physics, Berlin, Germany, 23-27 June 2014
Start page
P2.139
Peer reviewed
NON-REVIEWED
Event name | Event place | Event date |
Berlin | 23-27 June 2014 | |
Available on Infoscience
April 23, 2015