Resonant rf network antennas for inductively-coupled plasma sources


Published in:
Proceeding 41st EPS Conference on Plasma Physics, Berlin, Germany, 23-27 June 2014, P2.139
Presented at:
41st European Physical Society Conference on Plasma Physics, Berlin, 23-27 June 2014
Year:
2014
Laboratories:
SPC
CRPP




 Record created 2015-04-23, last modified 2018-01-28

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