000207156 001__ 207156
000207156 005__ 20180913063051.0
000207156 020__ $$a978-1-4799-4376-0
000207156 022__ $$a1930-8876
000207156 02470 $$2ISI$$a000348858100013
000207156 037__ $$aCONF
000207156 245__ $$aA 6.7 MHz Nanoelectromechanical Ring Oscillator Using Curved Cantilever Switches Coated with Amorphous Carbon
000207156 260__ $$aNew York$$bIEEE$$c2014
000207156 269__ $$a2014
000207156 300__ $$a4
000207156 336__ $$aConference Papers
000207156 490__ $$aProceedings of the European Solid-State Device Research Conference
000207156 520__ $$aNanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5x3 mu m(2), an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.
000207156 6531_ $$aNEM switches
000207156 6531_ $$aNEMS
000207156 6531_ $$aring oscillator
000207156 6531_ $$aVLSI
000207156 6531_ $$adigital logic design
000207156 6531_ $$acurved cantilever
000207156 6531_ $$aamorphous carbon
000207156 700__ $$aAyala, Christopher L.$$uIBM Res Zurich, Ruschlikon, Switzerland
000207156 700__ $$aGrogg, Daniel$$uIBM Res Zurich, Ruschlikon, Switzerland
000207156 700__ $$0242727$$aBazigos, Antonios$$g199069$$uEcole Polytech Fed Lausanne, Lausanne, Switzerland
000207156 700__ $$aBadia, Montserrat Fernandez-Bolanos$$uIBM Res Zurich, Ruschlikon, Switzerland
000207156 700__ $$aDuerig, Urs T.$$uIBM Res Zurich, Ruschlikon, Switzerland
000207156 700__ $$aDespont, Michel
000207156 700__ $$aHagleitner, Christoph$$uIBM Res Zurich, Ruschlikon, Switzerland
000207156 7112_ $$a44th European Solid-State Device Research Conference (ESSDERC), 44th European Solid-State Device Research Conference (ESSDERC)']
000207156 720_1 $$aBez, R$$eed.
000207156 720_1 $$aPavan, P$$eed.
000207156 720_1 $$aMeneghesso, G$$eed.
000207156 773__ $$q66-69$$tProceedings Of The 2014 44Th European Solid-State Device Research Conference (Essderc 2014)
000207156 909C0 $$0252177$$pNANOLAB$$xU10328
000207156 909CO $$ooai:infoscience.tind.io:207156$$pconf$$pSTI
000207156 917Z8 $$x198278
000207156 937__ $$aEPFL-CONF-207156
000207156 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000207156 980__ $$aCONF