A 6.7 MHz Nanoelectromechanical Ring Oscillator Using Curved Cantilever Switches Coated with Amorphous Carbon

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5x3 mu m(2), an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.


Editor(s):
Bez, R
Pavan, P
Meneghesso, G
Published in:
Proceedings Of The 2014 44Th European Solid-State Device Research Conference (Essderc 2014), 66-69
Presented at:
44th European Solid-State Device Research Conference (ESSDERC), 44th European Solid-State Device Research Conference (ESSDERC)']
Year:
2014
Publisher:
New York, IEEE
ISSN:
1930-8876
ISBN:
978-1-4799-4376-0
Keywords:
Laboratories:




 Record created 2015-04-13, last modified 2018-09-13


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