Simultaneous High-Speed High-Resolution Nanomechanical Mass Sensing

Mass sensing has so far rather developed along the resolution axis, reaching atomic-scale detection, than into the direction of high speed. This letter reports on a novel self-calibrating technique that makes high-speed inertial mass sensors capable of instant high-resolution detection and weighing. The sensing nanoelectromechanical resonator is embedded into a phase-locked loop and the sensor-inherent nonlinear phase-frequency relation is exploited for autocalibration.


Publié dans:
Ieee Sensors Journal, 14, 8, 2488-2489
Année
2014
Publisher:
Piscataway, Institute of Electrical and Electronics Engineers
ISSN:
1530-437X
Mots-clefs:
Laboratoires:




 Notice créée le 2015-02-20, modifiée le 2018-12-03


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