000205654 001__ 205654
000205654 005__ 20181203023801.0
000205654 0247_ $$2doi$$a10.1109/Jsen.2014.2322084
000205654 022__ $$a1530-437X
000205654 02470 $$2ISI$$a000347318000001
000205654 037__ $$aARTICLE
000205654 245__ $$aSimultaneous High-Speed High-Resolution Nanomechanical Mass Sensing
000205654 260__ $$bInstitute of Electrical and Electronics Engineers$$c2014$$aPiscataway
000205654 269__ $$a2014
000205654 300__ $$a2
000205654 336__ $$aJournal Articles
000205654 520__ $$aMass sensing has so far rather developed along the resolution axis, reaching atomic-scale detection, than into the direction of high speed. This letter reports on a novel self-calibrating technique that makes high-speed inertial mass sensors capable of instant high-resolution detection and weighing. The sensing nanoelectromechanical resonator is embedded into a phase-locked loop and the sensor-inherent nonlinear phase-frequency relation is exploited for autocalibration.
000205654 6531_ $$aNanoelectromechanical systems
000205654 6531_ $$anonlinear systems
000205654 6531_ $$aphase locked loops
000205654 6531_ $$asystem analysis and design
000205654 700__ $$0244588$$g166554$$aKauth, Christian
000205654 700__ $$0244585$$g111342$$aPastre, Marc
000205654 700__ $$aKayal, Maher$$g105540$$0240539
000205654 773__ $$j14$$tIeee Sensors Journal$$k8$$q2488-2489
000205654 909C0 $$xU11978$$0252315$$pELAB
000205654 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:205654
000205654 917Z8 $$x105540
000205654 937__ $$aEPFL-ARTICLE-205654
000205654 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000205654 980__ $$aARTICLE