Conference paper

Direct and selective synthesis of a wide range of carbon nanomaterials by CVD at CMOS compatible temperatures

Biosensors benefit from specific nano- to monitor human metabolites [1], [2]. Moreover, small structuration of the active bio-interface layer. In this electrodes allow us to design many sensing sites, each perspective, a wide range of carbon nanomaterials including multi-walled carbon nanotubes (MWCNTs), nanographite and carbon nanowalls (CNWs) have been directly synthesised by chemical vapor deposition (CVD) on Pt microelectrodes for the first time down to CMOS-compatible temperatures. This integration process, extremely useful to develop nanostructured multi-sensing site biodevices, has been validated by testing sensors for glucose with enhanced and competitive performance. Moreover it paves the way to the full integration of CMOS circuits, nanostructures and bioprobes.

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