000203383 001__ 203383
000203383 005__ 20181203023706.0
000203383 0247_ $$2doi$$a10.1016/j.surfcoat.2005.11.102
000203383 022__ $$a02578972
000203383 037__ $$aARTICLE
000203383 245__ $$aMultilayered and nanolayered hard nitride thin films deposited by cathodic arc evaporation. Part 1: Deposition, morphology and microstructure
000203383 260__ $$c2006
000203383 269__ $$a2006
000203383 336__ $$aJournal Articles
000203383 520__ $$aTiN/AlTiN, TiN/CrN and CrN/AlTiN multilayer coatings have been deposited by the cathodic arc evaporation technique. The period is in the range 7-200 nm for a total thickness of 3 μm. The period's control of the nanoscaled hard films is achieved, a priori, by way of a simple geometrical calculation and, a posteriori, via both X-ray diffraction and transmission electron microscopy on cross-sections. Microstructure of the as-deposited coatings has been investigated by means of X-ray diffraction and transmission electron microscopy in connection with the decrease of the period λ. For lower periods (multilayered coatings), the fcc structures which derive from each nitride are observed while only the superlattice structure is found for nanoscale layered films (nanolayered coatings). Microstructure evolution with the period is investigated for the three systems and the differences are comment. Tribological behaviours and cutting performances are studied in [C. Ducros, F. Sanchette, submitted to Surf. Coat. Technol.]. © 2006.
000203383 6531_ $$aArc evaporation
000203383 6531_ $$aDeposition
000203383 6531_ $$aEvaporation
000203383 6531_ $$aHard nitride
000203383 6531_ $$aMicrostructure
000203383 6531_ $$aMorphology
000203383 6531_ $$aMultilayer coatings
000203383 6531_ $$aMultilayers
000203383 6531_ $$aNitrides
000203383 6531_ $$aSuperlattice
000203383 6531_ $$aSuperlattices
000203383 6531_ $$aTEM
000203383 6531_ $$aThin films
000203383 6531_ $$aTransmission electron microscopy
000203383 6531_ $$aTribology
000203383 6531_ $$aX-ray diffraction
000203383 6531_ $$aX ray diffraction analysis
000203383 700__ $$aDucros, C.
000203383 700__ $$0248450$$g112215$$aCayron, C.
000203383 700__ $$aSanchette, F.
000203383 773__ $$j201$$tSurface and Coatings Technology$$q136-142
000203383 909C0 $$xU12903$$0252516$$pLMTM
000203383 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:203383
000203383 937__ $$aEPFL-ARTICLE-203383
000203383 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000203383 980__ $$aARTICLE