000203107 001__ 203107
000203107 005__ 20190812205810.0
000203107 020__ $$a978-1-4799-4378-4
000203107 0247_ $$2doi$$a10.1109/ESSDERC.2014.6948759
000203107 037__ $$aCONF
000203107 245__ $$aA 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon
000203107 269__ $$a2014
000203107 260__ $$bIEEE$$c2014
000203107 336__ $$aConference Papers
000203107 500__ $$aThis work was supported by the European 7th Framework Programme (EU-FP7) under grant agreement FP7-NEMIAC (No 288670).
000203107 520__ $$aNanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5×3 μm2, an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.
000203107 6531_ $$aNEM switches
000203107 6531_ $$aNEMS
000203107 6531_ $$aVLSI
000203107 6531_ $$aamorphous carbon
000203107 6531_ $$acurved cantilever
000203107 6531_ $$adigital logic design
000203107 6531_ $$aring oscillator
000203107 700__ $$aAyala, Christopher L.
000203107 700__ $$aGrogg, Daniel
000203107 700__ $$0242727$$g199069$$aBazigos, Antonios
000203107 700__ $$aBadia, Montserrat Fernandez-Bolanos
000203107 700__ $$aDuerig, Urs T.
000203107 700__ $$aDespont, Michel
000203107 700__ $$aHagleitner, Christoph
000203107 7112_ $$d22-26 Sept. 2014$$cVenice Lido, Italy$$aSolid State Device Research Conference (ESSDERC), 2014 44th European
000203107 773__ $$tProceedings of the 44th European Solid State Device Research Conference (ESSDERC), 2014$$q66-69
000203107 8564_ $$zURL$$uhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6948759
000203107 909C0 $$xU10328$$pNANOLAB$$0252177
000203107 909CO $$ooai:infoscience.tind.io:203107$$qGLOBAL_SET$$pconf$$pSTI
000203107 917Z8 $$x199069
000203107 937__ $$aEPFL-CONF-203107
000203107 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000203107 980__ $$aCONF