A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5×3 μm2, an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.


Published in:
Proceedings of the 44th European Solid State Device Research Conference (ESSDERC), 2014, 66 - 69
Presented at:
Solid State Device Research Conference (ESSDERC), 2014 44th European, Venice Lido, Italy, 22-26 Sept. 2014
Year:
2014
Publisher:
IEEE
ISBN:
978-1-4799-4378-4
Keywords:
Note:
This work was supported by the European 7th Framework Programme (EU-FP7) under grant agreement FP7-NEMIAC (No 288670).
Laboratories:




 Record created 2014-11-11, last modified 2018-03-17

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