000202246 001__ 202246
000202246 005__ 20181203023628.0
000202246 0247_ $$2doi$$a10.1016/j.carbon.2014.07.009
000202246 022__ $$a0008-6223
000202246 02470 $$2ISI$$a000341463900035
000202246 037__ $$aARTICLE
000202246 245__ $$aHigh-yield, in-situ fabrication and integration of horizontal carbon nanotube arrays at the wafer scale for robust ammonia sensors
000202246 260__ $$bPergamon-Elsevier Science Ltd$$c2014$$aOxford
000202246 269__ $$a2014
000202246 300__ $$a13
000202246 336__ $$aJournal Articles
000202246 520__ $$aThis paper reports the successful experimental demonstration of the localized growth of horizontal, dense carbon nanotube (CNT) arrays in situ and at the wafer scale. The selectivity and directionality of the CNT catalytic growth process along with the adequate design and fabrication of the catalyst support enables the direct integration of nanotubes arrays into heterogeneous devices. This novel CNT integration method is developed to manufacture conductance based gas sensors for ammonia detection and is demonstrated to produce a yield above 90% at the wafer scale. Owing to its flexibility, the integration process can be useful for a wide range of applications and complies with industrial requirements in terms of manufacturability and yield, requirements for the acceptance of CNTs as alternate materials. A state-of-the-art CNT array resistivity of 1.75 x 10(-5) m has been found from the CNT characterization. When exposed to low NH3 concentrations, the CNT sensors show good repeatability, long-term stability, and high design robustness and tackle the reproducibility challenge for CNT devices. Individual device calibration is not needed. The ammonia adsorption isotherm on the sensor is well fitted by Freundlich equation. The extrapolated detection limit is about 1 ppm. The dependence of the sensitivity with temperature indicates that ammonia sensing is likely to involve an endothermic process. Finally, relative humidity cross sensitivity has been found to have no adverse effect on the ammonia response enabling NH3 monitoring in ambient conditions. (C) 2014 Elsevier Ltd. All rights reserved.
000202246 700__ $$uEcole Polytech Fed Lausanne, Nanoelect Devices Lab NANOLAB, CH-1015 Lausanne, Switzerland$$aGuerin, Hoel
000202246 700__ $$uCEA Grenoble, DRT LITEN DTNM SEN, Nanomat Elaborat Serv, F-38054 Grenoble 9, France$$aLe Poche, Helene
000202246 700__ $$uSiemens AG Corp Technol, CT RTC SET CPS DE, D-81739 Munich, Germany$$aPohle, Rol
000202246 700__ $$uEcole Polytech Fed Lausanne, Nanoelect Devices Lab NANOLAB, CH-1015 Lausanne, Switzerland$$aBernard, Laurent Syavoch
000202246 700__ $$uCEA Grenoble, DRT LITEN DTNM SEN, Nanomat Elaborat Serv, F-38054 Grenoble 9, France$$aBuitrago, Elizabeth
000202246 700__ $$uCEA Grenoble, DRT LITEN DTNM SEN, Nanomat Elaborat Serv, F-38054 Grenoble 9, France$$aRamos, Raphael
000202246 700__ $$uEcole Polytech Fed Lausanne, Nanoelect Devices Lab NANOLAB, CH-1015 Lausanne, Switzerland$$aDijon, Jean
000202246 700__ $$g122431$$aIonescu, Adrian M.$$0241430
000202246 773__ $$j78$$tCarbon$$q326-338
000202246 909C0 $$xU10328$$0252177$$pNANOLAB
000202246 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:202246
000202246 917Z8 $$x198278
000202246 937__ $$aEPFL-ARTICLE-202246
000202246 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000202246 980__ $$aARTICLE