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PZT thin films for MEMS devices
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PZT thin films for MEMS devices from in-situ sputt[...]
-
Mazzalai, Andrea
- 6375
main
file(s):
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EPFL_TH6375
version 1
EPFL_TH6375.pdf
[15.58 MB]
27 Jan 2018, 12:28
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