Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip
Sandrini, Jury; Cevrero, Alessandro; Demirci, Tugba; Gaillardon, Pierre-Emmanuel; Sacchetto, Davide; De Micheli, Giovanni; Leblebici, Yusuf
2014

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Abstract

In this paper, we present a heterogeneous integration of ReRAMs with standard CMOS technology by post-processing the Back-End-of-the-Line (BEOL) of fully finished CMOS chips.

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Title Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip
Author(s) Sandrini, Jury ; Cevrero, Alessandro ; Demirci, Tugba ; Gaillardon, Pierre-Emmanuel ; Sacchetto, Davide ; De Micheli, Giovanni ; Leblebici, Yusuf
Published in Proceedings of the 40th International Micro and Nano Engineering Conference (MNE)
Conference 40th International Micro and Nano Engineering Conference (MNE), Lausanne, Switzerland, September 22-26, 2014
Date 2014
Keywords
Laboratories LSI1
LSM
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Scientific production and competences > I&C - School of Computer and Communication Sciences > IINFCOM > LSI1 - Integrated Systems Laboratory 1 (STI/IC)
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2014-09-30

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