On-chip near-infrared optical spectrometer based on single-mode Epo waveguide and gold nanoantennas

We report about optical spectrometry using gold nanostructures printed on top of an integrated optical waveguide. The optical waveguide is a single-mode buried waveguide made from a combination of photo-polymerizable materials and is fabricated by photolithography on a glass substrate. To detect the electric field inside the waveguide, a gold nanocoupler array of thin lines (50 nm thick and 8 mu m in length) is embedded on top of the aforementioned waveguide. They are produced by e-beam lithography. Both waveguide ports are polished, and the output port, in particular, is coated with a thin gold layer to assimilate a mirror and hence, it enables the creation of stationary waves inside the structure. Stationary waves generated inside the guide constitute a spatial interferogram. Locally, light is out-coupled using the nanocouplers and allows measuring the interferogram structure. The resulting pattern is imaged by a vision system involving an optical microscope with the objective lenses of different magnifications and a digital camera mounted on top of the microscope. The 5x objective lens demonstrates a superior performance in retrieving the investigated spectrum compared to 20x and 100x objectives. Fast Fourier transform is performed on the captured signal to extract the spectral content of the measured signal. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

Published in:
Journal Of Micro-Nanolithography Mems And Moems, 13, 2
Bellingham, Spie-Soc Photo-Optical Instrumentation Engineers

 Record created 2014-08-29, last modified 2018-12-03

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